JPS6438545U - - Google Patents
Info
- Publication number
- JPS6438545U JPS6438545U JP13264687U JP13264687U JPS6438545U JP S6438545 U JPS6438545 U JP S6438545U JP 13264687 U JP13264687 U JP 13264687U JP 13264687 U JP13264687 U JP 13264687U JP S6438545 U JPS6438545 U JP S6438545U
- Authority
- JP
- Japan
- Prior art keywords
- lead terminals
- diaphragm
- silicon chip
- pressure
- introduction port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13264687U JPS6438545U (en]) | 1987-08-31 | 1987-08-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13264687U JPS6438545U (en]) | 1987-08-31 | 1987-08-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6438545U true JPS6438545U (en]) | 1989-03-08 |
Family
ID=31389802
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13264687U Pending JPS6438545U (en]) | 1987-08-31 | 1987-08-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6438545U (en]) |
-
1987
- 1987-08-31 JP JP13264687U patent/JPS6438545U/ja active Pending